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SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor
Glass-like carbon (GC) is a nongraphitizing material composed entirely of carbon atoms produced from selected organic polymer resins by controlled pyrolysis in an inert atmosphere. The GC properties are a combination of the properties of glass, ceramic, and graphite, including hardness, low density,...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8831616/ https://www.ncbi.nlm.nih.gov/pubmed/35223080 http://dx.doi.org/10.1038/s41378-022-00351-9 |