Physicochemical Characteristics and Occupational Exposure of Silica Particles as Byproducts in a Semiconductor Sub Fab

This study aimed to elucidate the physicochemical characteristics and occupational exposure of silica powder and airborne particles as byproducts generated from the first scrubbers of chemical vapor deposition and diffusion processes during maintenance in a semiconductor facility sub fab to reduce u...

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Detalles Bibliográficos
Autores principales: Choi, Kwang-Min, Lee, Soo-Jin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8835547/
https://www.ncbi.nlm.nih.gov/pubmed/35162814
http://dx.doi.org/10.3390/ijerph19031791

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8835547/
https://www.ncbi.nlm.nih.gov/pubmed/35162814
http://dx.doi.org/10.3390/ijerph19031791

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