Extending the Validity of Squeeze Film Damping Models with Lower Aspect Ratios

Squeeze film air damping is a significant factor in the design of MEMS devices owing to its great impact on the dynamic performance of vibrating structures. However, the traditional theoretical results of squeeze film air damping are derived from the Reynolds equation, wherein there exists a deviati...

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Detalles Bibliográficos
Autores principales: Xu, Xiang, Fang, Weidong, Bai, Jian, Chen, Jiaxiao, Yao, Yuan, Lu, Qianbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838227/
https://www.ncbi.nlm.nih.gov/pubmed/35161801
http://dx.doi.org/10.3390/s22031054

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838227/
https://www.ncbi.nlm.nih.gov/pubmed/35161801
http://dx.doi.org/10.3390/s22031054

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