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Extending the Validity of Squeeze Film Damping Models with Lower Aspect Ratios
Squeeze film air damping is a significant factor in the design of MEMS devices owing to its great impact on the dynamic performance of vibrating structures. However, the traditional theoretical results of squeeze film air damping are derived from the Reynolds equation, wherein there exists a deviati...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838227/ https://www.ncbi.nlm.nih.gov/pubmed/35161801 http://dx.doi.org/10.3390/s22031054 |