Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements

Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip g...

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Detalles Bibliográficos
Autores principales: Xu, Min, Zhou, Ziqi, Ahbe, Thomas, Peiner, Erwin, Brand, Uwe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838276/
https://www.ncbi.nlm.nih.gov/pubmed/35162043
http://dx.doi.org/10.3390/s22031298

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838276/
https://www.ncbi.nlm.nih.gov/pubmed/35162043
http://dx.doi.org/10.3390/s22031298

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