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Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements
Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip g...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838276/ https://www.ncbi.nlm.nih.gov/pubmed/35162043 http://dx.doi.org/10.3390/s22031298 |