Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe

Although the recently developed cutoff probe is a promising tool to precisely infer plasma electron density by measuring the cutoff frequency ([Formula: see text]) in the S [Formula: see text] spectrum, it is currently only applicable to low-pressure plasma diagnostics below several torr. To improve...

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Detalles Bibliográficos
Autores principales: Kim, Si-jun, Lee, Jang-jae, Lee, Young-seok, Cho, Chul-hee, You, Shin-jae
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838313/
https://www.ncbi.nlm.nih.gov/pubmed/35162035
http://dx.doi.org/10.3390/s22031291

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838313/
https://www.ncbi.nlm.nih.gov/pubmed/35162035
http://dx.doi.org/10.3390/s22031291

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