Measurement of Shear Strengths of Cu Films Using Precise Chip Forming

The mechanical properties of thin films are under-researched because of the challenges associated with conventional experimental methods. We demonstrate a technique for determining the intrinsic shear strength and strain of thin films using a nano-cutting technique based on an orthogonal cutting mod...

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Detalles Bibliográficos
Autores principales: Lee, Jeong-Heon, Kwak, Jae B.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838378/
https://www.ncbi.nlm.nih.gov/pubmed/35160891
http://dx.doi.org/10.3390/ma15030948

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838378/
https://www.ncbi.nlm.nih.gov/pubmed/35160891
http://dx.doi.org/10.3390/ma15030948

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