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Measurement of Shear Strengths of Cu Films Using Precise Chip Forming
The mechanical properties of thin films are under-researched because of the challenges associated with conventional experimental methods. We demonstrate a technique for determining the intrinsic shear strength and strain of thin films using a nano-cutting technique based on an orthogonal cutting mod...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838378/ https://www.ncbi.nlm.nih.gov/pubmed/35160891 http://dx.doi.org/10.3390/ma15030948 |