Room Temperature Deposition of Nanocrystalline SiC Thin Films by DCMS/HiPIMS Co-Sputtering Technique

Due to an attractive combination of chemical and physical properties, silicon carbide (SiC) thin films are excellent candidates for coatings to be used in harsh environment applications or as protective coatings in heat exchanger applications. This work reports the deposition of near-stoichiometric...

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Detalles Bibliográficos
Autores principales: Tiron, Vasile, Ursu, Elena-Laura, Cristea, Daniel, Bulai, Georgiana, Stoian, George, Matei, Teodora, Velicu, Ioana-Laura
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8839145/
https://www.ncbi.nlm.nih.gov/pubmed/35159857
http://dx.doi.org/10.3390/nano12030512

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8839145/
https://www.ncbi.nlm.nih.gov/pubmed/35159857
http://dx.doi.org/10.3390/nano12030512

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