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Study on the Hydrophobic Modification of MTES/NH(3) Vapor Surface Treatment for SiO(2) Broadband Anti-Reflection Coating

In this article, ammonia and methyltriethoxysilane (MTES) were chosen as vapor phase modifiers for the base-catalyzed SiO(2) film. The surface of the film became more dense because of the hydroxyl condensation under the catalyst of ammonia, while the introduction of methyl groups by MTES of vapor tr...

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Detalles Bibliográficos
Autores principales: Fan, Qianyang, Liu, Hanxi, Jia, Xinli, Yan, Lianghong, Jiang, Bo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8839146/
https://www.ncbi.nlm.nih.gov/pubmed/35160860
http://dx.doi.org/10.3390/ma15030912