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Study on the Hydrophobic Modification of MTES/NH(3) Vapor Surface Treatment for SiO(2) Broadband Anti-Reflection Coating
In this article, ammonia and methyltriethoxysilane (MTES) were chosen as vapor phase modifiers for the base-catalyzed SiO(2) film. The surface of the film became more dense because of the hydroxyl condensation under the catalyst of ammonia, while the introduction of methyl groups by MTES of vapor tr...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8839146/ https://www.ncbi.nlm.nih.gov/pubmed/35160860 http://dx.doi.org/10.3390/ma15030912 |