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An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode
In this paper, we presented a novel electrostatic Roll/Pitch MEMS gyroscope with in-plane drive mode and out-of-plane sense mode. The proposed structure is developed based on a tuning fork gyroscope with decoupled sense mass on each tine that control the sense out-of-plane frequency. A multi-height...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8839371/ https://www.ncbi.nlm.nih.gov/pubmed/35161449 http://dx.doi.org/10.3390/s22030702 |