An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode

In this paper, we presented a novel electrostatic Roll/Pitch MEMS gyroscope with in-plane drive mode and out-of-plane sense mode. The proposed structure is developed based on a tuning fork gyroscope with decoupled sense mass on each tine that control the sense out-of-plane frequency. A multi-height...

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Detalles Bibliográficos
Autores principales: Khaled, Ahmed, Salman, Ahmed M., Aljehani, Nawaf S., Alzahem, Ibrahim F., Almikhlafi, Ridha S., Noor, Radwan M., Seddiq, Yasser M., Alghamdi, Majed S., Soliman, Mostafa, Mahmoud, Mohamed A. E.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8839371/
https://www.ncbi.nlm.nih.gov/pubmed/35161449
http://dx.doi.org/10.3390/s22030702

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