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Controlled Deposition of Nanostructured Hierarchical TiO(2) Thin Films by Low Pressure Supersonic Plasma Jets
Plasma-assisted supersonic jet deposition (PA-SJD) is a precise technique for the fabrication of thin films with a desired nanostructured morphology. In this work, we used quadrupole mass spectrometry of the neutral species in the jet and the extensive characterization of TiO(2) films to improve our...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8839591/ https://www.ncbi.nlm.nih.gov/pubmed/35159878 http://dx.doi.org/10.3390/nano12030533 |