Embedded UV Sensors in CMOS SOI Technology

We report on ultraviolet (UV) sensors employing high voltage PIN lateral photodiode strings integrated into the production RF SOI (silicon on isolator) CMOS platform. The sensors were optimized for applications that require measurements of short wavelength ultraviolet (UVC) radiation under strong vi...

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Detalles Bibliográficos
Autores principales: Yampolsky, Michael, Pikhay, Evgeny, Roizin, Yakov
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8839690/
https://www.ncbi.nlm.nih.gov/pubmed/35161472
http://dx.doi.org/10.3390/s22030712

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8839690/
https://www.ncbi.nlm.nih.gov/pubmed/35161472
http://dx.doi.org/10.3390/s22030712

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