Wafer scale manufacturing of high precision micro-optical components through X-ray lithography yielding 1800 Gray Levels in a fingertip sized chip

We present a novel x-ray lithography based micromanufacturing methodology that offers scalable manufacturing of high precision optical components. It is accomplished through simultaneous usage of multiple stencil masks made moveable with respect to one another through custom made micromotion stages....

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Detalles Bibliográficos
Autores principales: Kalaiselvi, S. M. P., Tang, E. X., Moser, H. O., Breese, M. B. H., Turaga, S. P., Kasi, H., Heussler, S. P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8854699/
https://www.ncbi.nlm.nih.gov/pubmed/35177735
http://dx.doi.org/10.1038/s41598-022-06688-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8854699/
https://www.ncbi.nlm.nih.gov/pubmed/35177735
http://dx.doi.org/10.1038/s41598-022-06688-5

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