Large-Scale Monolithic Fabrication of III–V Vertical Nanowires on a Standard Si(100) Microelectronic Substrate

[Image: see text] Vertical III–V nanowires are of great interest for a large number of applications, but their integration still suffers from manufacturing difficulties of these one-dimensional nanostructures on the standard Si(100) microelectronic platform at a large scale. Here, a top-down approac...

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Detalles Bibliográficos
Autores principales: Lecestre, Aurélie, Martin, Mickael, Cristiano, Filadelfo, Baron, Thierry, Larrieu, Guilhem
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8867577/
https://www.ncbi.nlm.nih.gov/pubmed/35224344
http://dx.doi.org/10.1021/acsomega.1c05876

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8867577/
https://www.ncbi.nlm.nih.gov/pubmed/35224344
http://dx.doi.org/10.1021/acsomega.1c05876

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