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Microelectromechanical Systems (MEMS) for Biomedical Applications

The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining...

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Detalles Bibliográficos
Autores principales: Chircov, Cristina, Grumezescu, Alexandru Mihai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8875460/
https://www.ncbi.nlm.nih.gov/pubmed/35208289
http://dx.doi.org/10.3390/mi13020164