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Microelectromechanical Systems (MEMS) for Biomedical Applications
The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8875460/ https://www.ncbi.nlm.nih.gov/pubmed/35208289 http://dx.doi.org/10.3390/mi13020164 |