A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure

This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the...

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Detalles Bibliográficos
Autores principales: Chen, Mingwei, Zhong, Anxiang, Lu, Yulan, Chen, Jian, Chen, Deyong, Wang, Junbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8875607/
https://www.ncbi.nlm.nih.gov/pubmed/35208310
http://dx.doi.org/10.3390/mi13020186

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8875607/
https://www.ncbi.nlm.nih.gov/pubmed/35208310
http://dx.doi.org/10.3390/mi13020186

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