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A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure

This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the...

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Detalles Bibliográficos
Autores principales: Chen, Mingwei, Zhong, Anxiang, Lu, Yulan, Chen, Jian, Chen, Deyong, Wang, Junbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8875607/
https://www.ncbi.nlm.nih.gov/pubmed/35208310
http://dx.doi.org/10.3390/mi13020186
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author Chen, Mingwei
Zhong, Anxiang
Lu, Yulan
Chen, Jian
Chen, Deyong
Wang, Junbo
author_facet Chen, Mingwei
Zhong, Anxiang
Lu, Yulan
Chen, Jian
Chen, Deyong
Wang, Junbo
author_sort Chen, Mingwei
collection PubMed
description This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the electrode area and the sensitivity of the device. Finite element simulation was conducted for geometry optimization where the anode length, the orifice diameter, and the orifice spacing of the sensitive unit were determined as 200 μm, 80 μm, and 500 μm, respectively. Microfabrication was conducted to manufacture the silicon-based three-electrode structure, which then was assembled to form the electrochemical angular micro-accelerometer, leveraging mechanical compression. Device characterization was conducted, where the sensitivity, bandwidth, and noise level were quantified as 290.193 V/(rad/s(2)) at 1 Hz, 0.01–2 Hz, and 1.78 × 10(−8) (rad/s(2))/Hz(1/2) at 1 Hz, respectively. Due to the inclusion of the silicon-based three-electrode structure, compared with previously reported electrochemical angular accelerometers, the angular accelerometer developed in this article was featured with a higher sensitivity and a lower self-noise level. Therefore, it could be used for the measurement of low-frequency seismic rotation signals and played a role in the seismic design of building structures.
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spelling pubmed-88756072022-02-26 A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure Chen, Mingwei Zhong, Anxiang Lu, Yulan Chen, Jian Chen, Deyong Wang, Junbo Micromachines (Basel) Article This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the electrode area and the sensitivity of the device. Finite element simulation was conducted for geometry optimization where the anode length, the orifice diameter, and the orifice spacing of the sensitive unit were determined as 200 μm, 80 μm, and 500 μm, respectively. Microfabrication was conducted to manufacture the silicon-based three-electrode structure, which then was assembled to form the electrochemical angular micro-accelerometer, leveraging mechanical compression. Device characterization was conducted, where the sensitivity, bandwidth, and noise level were quantified as 290.193 V/(rad/s(2)) at 1 Hz, 0.01–2 Hz, and 1.78 × 10(−8) (rad/s(2))/Hz(1/2) at 1 Hz, respectively. Due to the inclusion of the silicon-based three-electrode structure, compared with previously reported electrochemical angular accelerometers, the angular accelerometer developed in this article was featured with a higher sensitivity and a lower self-noise level. Therefore, it could be used for the measurement of low-frequency seismic rotation signals and played a role in the seismic design of building structures. MDPI 2022-01-26 /pmc/articles/PMC8875607/ /pubmed/35208310 http://dx.doi.org/10.3390/mi13020186 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Chen, Mingwei
Zhong, Anxiang
Lu, Yulan
Chen, Jian
Chen, Deyong
Wang, Junbo
A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure
title A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure
title_full A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure
title_fullStr A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure
title_full_unstemmed A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure
title_short A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure
title_sort mems electrochemical angular accelerometer leveraging silicon-based three-electrode structure
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8875607/
https://www.ncbi.nlm.nih.gov/pubmed/35208310
http://dx.doi.org/10.3390/mi13020186
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