Cargando…
A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure
This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8875607/ https://www.ncbi.nlm.nih.gov/pubmed/35208310 http://dx.doi.org/10.3390/mi13020186 |