Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets

A fully integrable magnetic microposition detection for miniaturized systems like MEMS devices is demonstrated. Whereas current magnetic solutions are based on the use of hybrid mounted magnets, here a combination of Hall sensors with a novel kind of wafer-level integrable micromagnet is presented....

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Detalles Bibliográficos
Autores principales: Gojdka, Björn, Cichon, Daniel, Lembrecht, Yannik, Bodduluri, Mani Teja, Lisec, Thomas, Stahl-Offergeld, Markus, Hohe, Hans-Peter, Niekiel, Florian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8876954/
https://www.ncbi.nlm.nih.gov/pubmed/35208359
http://dx.doi.org/10.3390/mi13020235

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8876954/
https://www.ncbi.nlm.nih.gov/pubmed/35208359
http://dx.doi.org/10.3390/mi13020235

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