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Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets
A fully integrable magnetic microposition detection for miniaturized systems like MEMS devices is demonstrated. Whereas current magnetic solutions are based on the use of hybrid mounted magnets, here a combination of Hall sensors with a novel kind of wafer-level integrable micromagnet is presented....
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8876954/ https://www.ncbi.nlm.nih.gov/pubmed/35208359 http://dx.doi.org/10.3390/mi13020235 |