Sequential Infiltration Synthesis into Maltoheptaose and Poly(styrene): Implications for Sub-10 nm Pattern Transfer

Vapor phase infiltration into a self-assembled block copolymer (BCP) to create a hybrid material in one of the constituent blocks can enhance the etch selectivity for pattern transfer. Multiple pulse infiltration into carbohydrate-based high-χ BCP has previously been shown to enable sub-10 nm featur...

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Detalles Bibliográficos
Autores principales: Löfstrand, Anette, Vorobiev, Alexei, Mumtaz, Muhammad, Borsali, Redouane, Maximov, Ivan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878060/
https://www.ncbi.nlm.nih.gov/pubmed/35215576
http://dx.doi.org/10.3390/polym14040654

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878060/
https://www.ncbi.nlm.nih.gov/pubmed/35215576
http://dx.doi.org/10.3390/polym14040654

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