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Sequential Infiltration Synthesis into Maltoheptaose and Poly(styrene): Implications for Sub-10 nm Pattern Transfer

Vapor phase infiltration into a self-assembled block copolymer (BCP) to create a hybrid material in one of the constituent blocks can enhance the etch selectivity for pattern transfer. Multiple pulse infiltration into carbohydrate-based high-χ BCP has previously been shown to enable sub-10 nm featur...

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Detalles Bibliográficos
Autores principales:	Löfstrand, Anette, Vorobiev, Alexei, Mumtaz, Muhammad, Borsali, Redouane, Maximov, Ivan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878060/ https://www.ncbi.nlm.nih.gov/pubmed/35215576 http://dx.doi.org/10.3390/polym14040654

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