The Evaluation of Counter Diffusion CVD Silica Membrane Formation Process by In Situ Analysis of Diffusion Carrier Gas

A new evaluation method for preparing silica membranes by counter diffusion chemical vapor deposition (CVD) was proposed. This is the first attempt to provide new insights, such as the decomposition products, membrane selectivity, and precursor reactivity. The permeation of the carrier gas used for...

Descripción completa

Detalles Bibliográficos
Autores principales: Ishii, Katsunori, Nomura, Mikihiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878109/
https://www.ncbi.nlm.nih.gov/pubmed/35207024
http://dx.doi.org/10.3390/membranes12020102

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878109/
https://www.ncbi.nlm.nih.gov/pubmed/35207024
http://dx.doi.org/10.3390/membranes12020102

Ejemplares similares