Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure

This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as mode matching, improving the quality factor, etc. This paper focuses on the analy...

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Detalles Bibliográficos
Autores principales: Xiong, Chuanguo, Zeng, Pengjun, Lv, Weishan, Lu, Fengming, Zhang, Ming, Huang, Yuhua, Zhu, Fulong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878307/
https://www.ncbi.nlm.nih.gov/pubmed/35208297
http://dx.doi.org/10.3390/mi13020172

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878307/
https://www.ncbi.nlm.nih.gov/pubmed/35208297
http://dx.doi.org/10.3390/mi13020172

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