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Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure
This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as mode matching, improving the quality factor, etc. This paper focuses on the analy...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878307/ https://www.ncbi.nlm.nih.gov/pubmed/35208297 http://dx.doi.org/10.3390/mi13020172 |