Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Her...

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Detalles Bibliográficos
Autores principales: Wang, Bao-Xu, Zheng, Jia-Xin, Qi, Jin-Yong, Guo, Ming-Rui, Gao, Bing-Rong, Liu, Xue-Qing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878309/
https://www.ncbi.nlm.nih.gov/pubmed/35208341
http://dx.doi.org/10.3390/mi13020218

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878309/
https://www.ncbi.nlm.nih.gov/pubmed/35208341
http://dx.doi.org/10.3390/mi13020218

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