Research on Processing Technology of Multi-Layer Heterogeneous Material Composite Micron Cantilever Beam Structure

In order to overcome the simplicity and instability of micron cantilever membrane structure, sacrificial layer technology and multi-layer heterogeneous material composite stacking technology were designated. Based on the research with respect to a multi-layer heterogeneous cantilever beam structure,...

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Detalles Bibliográficos
Autores principales: Shang, Yingqi, Zhang, Hongquan, Wu, Zuofei, Chen, Dongsa, Wu, Shuangyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8879762/
https://www.ncbi.nlm.nih.gov/pubmed/35208269
http://dx.doi.org/10.3390/mi13020144

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8879762/
https://www.ncbi.nlm.nih.gov/pubmed/35208269
http://dx.doi.org/10.3390/mi13020144

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