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Research on Processing Technology of Multi-Layer Heterogeneous Material Composite Micron Cantilever Beam Structure
In order to overcome the simplicity and instability of micron cantilever membrane structure, sacrificial layer technology and multi-layer heterogeneous material composite stacking technology were designated. Based on the research with respect to a multi-layer heterogeneous cantilever beam structure,...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8879762/ https://www.ncbi.nlm.nih.gov/pubmed/35208269 http://dx.doi.org/10.3390/mi13020144 |