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Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
The atomic layer technique is generating a lot of excitement and study due to its profound physics and enormous potential in device fabrication. This article reviews current developments in atomic layer technology for spintronics, including atomic layer deposition (ALD) and atomic layer etching (ALE...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8880290/ https://www.ncbi.nlm.nih.gov/pubmed/35214988 http://dx.doi.org/10.3390/nano12040661 |
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author | Tsai, Yuanlu Li, Zhiteng Hu, Shaojie |
author_facet | Tsai, Yuanlu Li, Zhiteng Hu, Shaojie |
author_sort | Tsai, Yuanlu |
collection | PubMed |
description | The atomic layer technique is generating a lot of excitement and study due to its profound physics and enormous potential in device fabrication. This article reviews current developments in atomic layer technology for spintronics, including atomic layer deposition (ALD) and atomic layer etching (ALE). To begin, we introduce the main atomic layer deposition techniques. Then, in a brief review, we discuss ALE technology for insulators, semiconductors, metals, and newly created two-dimensional van der Waals materials. Additionally, we compare the critical factors learned from ALD to constructing ALE technology. Finally, we discuss the future prospects and challenges of atomic layer technology in the field of spinronics. |
format | Online Article Text |
id | pubmed-8880290 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-88802902022-02-26 Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects Tsai, Yuanlu Li, Zhiteng Hu, Shaojie Nanomaterials (Basel) Article The atomic layer technique is generating a lot of excitement and study due to its profound physics and enormous potential in device fabrication. This article reviews current developments in atomic layer technology for spintronics, including atomic layer deposition (ALD) and atomic layer etching (ALE). To begin, we introduce the main atomic layer deposition techniques. Then, in a brief review, we discuss ALE technology for insulators, semiconductors, metals, and newly created two-dimensional van der Waals materials. Additionally, we compare the critical factors learned from ALD to constructing ALE technology. Finally, we discuss the future prospects and challenges of atomic layer technology in the field of spinronics. MDPI 2022-02-16 /pmc/articles/PMC8880290/ /pubmed/35214988 http://dx.doi.org/10.3390/nano12040661 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Tsai, Yuanlu Li, Zhiteng Hu, Shaojie Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects |
title | Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects |
title_full | Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects |
title_fullStr | Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects |
title_full_unstemmed | Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects |
title_short | Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects |
title_sort | recent progress of atomic layer technology in spintronics: mechanism, materials and prospects |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8880290/ https://www.ncbi.nlm.nih.gov/pubmed/35214988 http://dx.doi.org/10.3390/nano12040661 |
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