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Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects

The atomic layer technique is generating a lot of excitement and study due to its profound physics and enormous potential in device fabrication. This article reviews current developments in atomic layer technology for spintronics, including atomic layer deposition (ALD) and atomic layer etching (ALE...

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Detalles Bibliográficos
Autores principales: Tsai, Yuanlu, Li, Zhiteng, Hu, Shaojie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8880290/
https://www.ncbi.nlm.nih.gov/pubmed/35214988
http://dx.doi.org/10.3390/nano12040661
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author Tsai, Yuanlu
Li, Zhiteng
Hu, Shaojie
author_facet Tsai, Yuanlu
Li, Zhiteng
Hu, Shaojie
author_sort Tsai, Yuanlu
collection PubMed
description The atomic layer technique is generating a lot of excitement and study due to its profound physics and enormous potential in device fabrication. This article reviews current developments in atomic layer technology for spintronics, including atomic layer deposition (ALD) and atomic layer etching (ALE). To begin, we introduce the main atomic layer deposition techniques. Then, in a brief review, we discuss ALE technology for insulators, semiconductors, metals, and newly created two-dimensional van der Waals materials. Additionally, we compare the critical factors learned from ALD to constructing ALE technology. Finally, we discuss the future prospects and challenges of atomic layer technology in the field of spinronics.
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spelling pubmed-88802902022-02-26 Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects Tsai, Yuanlu Li, Zhiteng Hu, Shaojie Nanomaterials (Basel) Article The atomic layer technique is generating a lot of excitement and study due to its profound physics and enormous potential in device fabrication. This article reviews current developments in atomic layer technology for spintronics, including atomic layer deposition (ALD) and atomic layer etching (ALE). To begin, we introduce the main atomic layer deposition techniques. Then, in a brief review, we discuss ALE technology for insulators, semiconductors, metals, and newly created two-dimensional van der Waals materials. Additionally, we compare the critical factors learned from ALD to constructing ALE technology. Finally, we discuss the future prospects and challenges of atomic layer technology in the field of spinronics. MDPI 2022-02-16 /pmc/articles/PMC8880290/ /pubmed/35214988 http://dx.doi.org/10.3390/nano12040661 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Tsai, Yuanlu
Li, Zhiteng
Hu, Shaojie
Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
title Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
title_full Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
title_fullStr Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
title_full_unstemmed Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
title_short Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
title_sort recent progress of atomic layer technology in spintronics: mechanism, materials and prospects
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8880290/
https://www.ncbi.nlm.nih.gov/pubmed/35214988
http://dx.doi.org/10.3390/nano12040661
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