Comparison of NH(3) and N(2)O Plasma Treatments on Bi(2)O(3) Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure

In this study, bismuth trioxide (Bi(2)O(3)) membranes in an electrolyte–insulator–semiconductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing performance, the membranes were treated with two types of plasma—NH(3) and N(2)O. To investigate the material property i...

Descripción completa

Detalles Bibliográficos
Autores principales: Kao, Chyuan-Haur, Chen, Kuan-Lin, Chiu, Yi-Shiang, Hao, Lin Sang, Chen, Shih-Ming, Li, Ming-Hsien, Lee, Ming-Ling, Chen, Hsiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8880718/
https://www.ncbi.nlm.nih.gov/pubmed/35207109
http://dx.doi.org/10.3390/membranes12020188

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8880718/
https://www.ncbi.nlm.nih.gov/pubmed/35207109
http://dx.doi.org/10.3390/membranes12020188

Ejemplares similares