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Comparison of NH(3) and N(2)O Plasma Treatments on Bi(2)O(3) Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure
In this study, bismuth trioxide (Bi(2)O(3)) membranes in an electrolyte–insulator–semiconductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing performance, the membranes were treated with two types of plasma—NH(3) and N(2)O. To investigate the material property i...
Autores principales: | Kao, Chyuan-Haur, Chen, Kuan-Lin, Chiu, Yi-Shiang, Hao, Lin Sang, Chen, Shih-Ming, Li, Ming-Hsien, Lee, Ming-Ling, Chen, Hsiang |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8880718/ https://www.ncbi.nlm.nih.gov/pubmed/35207109 http://dx.doi.org/10.3390/membranes12020188 |
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