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Thermal stability of Si/SiC/ta-C composite coatings and improvement of tribological properties through high-temperature annealing
We report the structure, mechanical properties, thermal stability, and durability of Si/SiC/ta-C composite (Si–ta-C) coatings fabricated using simultaneous filtered cathodic vacuum arc deposition and direct current unbalanced magnetron sputtering. Si concentration of 1.25–6.04 at.% was achieved by i...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8894414/ https://www.ncbi.nlm.nih.gov/pubmed/35241762 http://dx.doi.org/10.1038/s41598-022-07514-8 |