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Thermal stability of Si/SiC/ta-C composite coatings and improvement of tribological properties through high-temperature annealing

We report the structure, mechanical properties, thermal stability, and durability of Si/SiC/ta-C composite (Si–ta-C) coatings fabricated using simultaneous filtered cathodic vacuum arc deposition and direct current unbalanced magnetron sputtering. Si concentration of 1.25–6.04 at.% was achieved by i...

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Detalles Bibliográficos
Autores principales: Jang, Young-Jun, Kim, Jae-Il, Kim, Won-seok, Kim, Do Hyun, Kim, Jongkuk
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8894414/
https://www.ncbi.nlm.nih.gov/pubmed/35241762
http://dx.doi.org/10.1038/s41598-022-07514-8