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Diffuse X-ray scattering from polished silicon: application of the distorted wave Born approximation

Measured diffuse X-ray scattering data for a ‘smooth’ as well as for a ‘rough’ silicon sample were fit to theoretical expressions within the distorted wave Born approximation (DWBA). Data for the power spectral density (PSD) for both samples were also obtained by means of atomic force microscopy and...

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Detalles Bibliográficos
Autores principales: Macrander, Albert, Assoufid, Lahsen, Narayanan, Suresh, Khachatryan, Ruben
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8900862/
https://www.ncbi.nlm.nih.gov/pubmed/35254308
http://dx.doi.org/10.1107/S1600577522000534