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Mass production-enabled computational spectrometers based on multilayer thin films
Multilayer thin film (MTF) filter arrays for computational spectroscopy are fabricated using stencil lithography. The MTF filter array is a 6 × 6 square grid, and 169 identical arrays are fabricated on a single wafer. A computational spectrometer is formed by attaching the MTF filter array on a comp...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8904474/ https://www.ncbi.nlm.nih.gov/pubmed/35260730 http://dx.doi.org/10.1038/s41598-022-08037-y |