Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications

In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam...

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Detalles Bibliográficos
Autores principales: García-Ramírez, Mario Alberto, González-Reynoso, Orfil, Bello-Jiménez, Miguel Angel, Vargas-Rodríguez, Everado
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8914766/
https://www.ncbi.nlm.nih.gov/pubmed/35270953
http://dx.doi.org/10.3390/s22051806

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8914766/
https://www.ncbi.nlm.nih.gov/pubmed/35270953
http://dx.doi.org/10.3390/s22051806

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