Cargando…
Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications
In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam...
Autores principales: | , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8914766/ https://www.ncbi.nlm.nih.gov/pubmed/35270953 http://dx.doi.org/10.3390/s22051806 |
_version_ | 1784667821870940160 |
---|---|
author | García-Ramírez, Mario Alberto González-Reynoso, Orfil Bello-Jiménez, Miguel Angel Vargas-Rodríguez, Everado |
author_facet | García-Ramírez, Mario Alberto González-Reynoso, Orfil Bello-Jiménez, Miguel Angel Vargas-Rodríguez, Everado |
author_sort | García-Ramírez, Mario Alberto |
collection | PubMed |
description | In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics. |
format | Online Article Text |
id | pubmed-8914766 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-89147662022-03-12 Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications García-Ramírez, Mario Alberto González-Reynoso, Orfil Bello-Jiménez, Miguel Angel Vargas-Rodríguez, Everado Sensors (Basel) Communication In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics. MDPI 2022-02-25 /pmc/articles/PMC8914766/ /pubmed/35270953 http://dx.doi.org/10.3390/s22051806 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Communication García-Ramírez, Mario Alberto González-Reynoso, Orfil Bello-Jiménez, Miguel Angel Vargas-Rodríguez, Everado Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
title | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
title_full | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
title_fullStr | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
title_full_unstemmed | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
title_short | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
title_sort | design, fabrication, and characterisation of a label-free nanosensor for bioapplications |
topic | Communication |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8914766/ https://www.ncbi.nlm.nih.gov/pubmed/35270953 http://dx.doi.org/10.3390/s22051806 |
work_keys_str_mv | AT garciaramirezmarioalberto designfabricationandcharacterisationofalabelfreenanosensorforbioapplications AT gonzalezreynosoorfil designfabricationandcharacterisationofalabelfreenanosensorforbioapplications AT bellojimenezmiguelangel designfabricationandcharacterisationofalabelfreenanosensorforbioapplications AT vargasrodriguezeverado designfabricationandcharacterisationofalabelfreenanosensorforbioapplications |