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Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications
In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8914766/ https://www.ncbi.nlm.nih.gov/pubmed/35270953 http://dx.doi.org/10.3390/s22051806 |