Designing Conductive‐Bridge Phase‐Change Memory to Enable Ultralow Programming Power

Phase‐change material (PCM) devices are one of the most mature nonvolatile memories. However, their high power consumption remains a bottleneck problem limiting the data storage density. One may drastically reduce the programming power by patterning the PCM volume down to nanometer scale, but that route incurs a stiff penalty from the tremendous cost associated with the complex nanofabrication protocols required. Instead, here a materials solution to resolve this dilemma is offered. The authors work with memory cells of conventional dimensions, but design/exploit a PCM alloy that decomposes into a heterogeneous network of nanoscale crystalline domains intermixed with amorphous ones. The idea is to confine the subsequent phase‐change switching in the interface region of the crystalline nanodomain with its amorphous surrounding, forming/breaking “nano‐bridges” that link up the crystalline domains into a conductive path. This conductive‐bridge switching mechanism thus only involves nanometer‐scale volume in programming, despite of the large areas in contact with the electrodes. The pore‐like devices based on spontaneously phase‐separated Ge(13)Sb(71)O(16) alloy enable a record‐low programming energy, down to a few tens of femtojoule. The new PCM/fabrication is fully compatible with the current 3D integration technology, adding no expenses or difficulty in processing.