Tribological Performance of Diamond Films with Different Roughnesses of Silicon Nitride Substrates and Carbon Source Concentrations

Diamond films were deposited on silicon nitride (Si(3)N(4)) substrates with three different roughnesses using the method of hot-filament chemical vapor deposition (HFCVD). The tribological properties of the film were studied by changing the deposition time, deposition distance, and methane (CH(4)) c...

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Detalles Bibliográficos
Autores principales: Lu, Feng, Liu, Tianwei, Bai, Xu, Wu, Yuhou, Wang, He, Yan, Guangyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8948657/
https://www.ncbi.nlm.nih.gov/pubmed/35323812
http://dx.doi.org/10.3390/membranes12030336

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8948657/
https://www.ncbi.nlm.nih.gov/pubmed/35323812
http://dx.doi.org/10.3390/membranes12030336

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