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Tribological Performance of Diamond Films with Different Roughnesses of Silicon Nitride Substrates and Carbon Source Concentrations
Diamond films were deposited on silicon nitride (Si(3)N(4)) substrates with three different roughnesses using the method of hot-filament chemical vapor deposition (HFCVD). The tribological properties of the film were studied by changing the deposition time, deposition distance, and methane (CH(4)) c...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8948657/ https://www.ncbi.nlm.nih.gov/pubmed/35323812 http://dx.doi.org/10.3390/membranes12030336 |