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A Novel AlGaN/Si(3)N(4) Compound Buffer Layer HEMT with Improved Breakdown Performances
In this article, an AlGaN and Si(3)N(4) compound buffer layer high electron mobility transistor (HEMT) is proposed and analyzed through TCAD simulations. In the proposed HEMT, the Si(3)N(4) insulating layer is partially buried between the AlGaN buffer layer and AlN nucleating layer, which introduces...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8949781/ https://www.ncbi.nlm.nih.gov/pubmed/35334756 http://dx.doi.org/10.3390/mi13030464 |