PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

A comprehensive overview of PowderMEMS—a novel back-end-of-line-compatible microfabrication technology—is presented in this paper. The PowderMEMS process solidifies micron-sized particles via atomic layer deposition (ALD) to create three-dimensional microstructures on planar substrates from a wide v...

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Detalles Bibliográficos
Autores principales: Lisec, Thomas, Behrmann, Ole, Gojdka, Björn
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8950110/
https://www.ncbi.nlm.nih.gov/pubmed/35334690
http://dx.doi.org/10.3390/mi13030398

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8950110/
https://www.ncbi.nlm.nih.gov/pubmed/35334690
http://dx.doi.org/10.3390/mi13030398

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