Area-Selective, In-Situ Growth of Pd-Modified ZnO Nanowires on MEMS Hydrogen Sensors

Nanomaterials are widely utilized as sensing materials in semiconductor gas sensors. As sensor sizes continue to shrink, it becomes increasingly challenging to construct micro-scale sensing materials on a micro-sensor with good uniformity and stability. Therefore, in-situ growth with a desired patte...

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Detalles Bibliográficos
Autores principales: Hu, Jiahao, Zhang, Tao, Chen, Ying, Xu, Pengcheng, Zheng, Dan, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8950579/
https://www.ncbi.nlm.nih.gov/pubmed/35335814
http://dx.doi.org/10.3390/nano12061001

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8950579/
https://www.ncbi.nlm.nih.gov/pubmed/35335814
http://dx.doi.org/10.3390/nano12061001

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