Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical acc...

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Detalles Bibliográficos
Autores principales: Abozyd, Samir, Toraya, Abdelrahman, Gaber, Noha
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8951410/
https://www.ncbi.nlm.nih.gov/pubmed/35334635
http://dx.doi.org/10.3390/mi13030343

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8951410/
https://www.ncbi.nlm.nih.gov/pubmed/35334635
http://dx.doi.org/10.3390/mi13030343

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