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Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements
Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical acc...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8951410/ https://www.ncbi.nlm.nih.gov/pubmed/35334635 http://dx.doi.org/10.3390/mi13030343 |