Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge

TiSiCN coatings have been obtained by anode evaporation of titanium and the decomposition of hexamethyldisilazane in an arc discharge, using a self-heated hollow cathode, at the pressure rate of 1 mTorr of the Ar+N(2) gas mixture. The proposed method makes it possible to independently and widely cha...

Descripción completa

Detalles Bibliográficos
Autores principales: Menshakov, Andrey I., Bruhanova, Yulia A., Kukharenko, Andrey I., Zhidkov, Ivan S.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8952341/
https://www.ncbi.nlm.nih.gov/pubmed/35323796
http://dx.doi.org/10.3390/membranes12030321

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8952341/
https://www.ncbi.nlm.nih.gov/pubmed/35323796
http://dx.doi.org/10.3390/membranes12030321

Ejemplares similares